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5-axis CNC milling drawing: Al 7075-T6 block with pockets, toolpath and dimensions
Industry · Semiconductor

Wafer handling. Vacuum chambers. ASML Tier-2.

CNC manufacturing for semiconductor fab equipment. ASML, Applied Materials, Lam Research, Tokyo Electron Tier-2/3 supply chain. Vacuum chamber components, wafer handling hardware, lithography optical mounts, precision stages. UHV clean, ESD-safe, Invar 36 precision.

Electronics & semiconductorWuxi, ChinaMOQ 1 partDFM review included
Technical plate for Wafer handling. Vacuum chambers. ASML Tier-2.
How we run it

Industry semiconductor

Different semiconductor tools have different manufacturing requirements. Lithography prioritizes precision. Etch prioritizes chemical resistance. Deposition prioritizes cleanliness.

3-7 daysTypical lead time
MOQ 1No minimum quantity
<4 hQuote response
ISO 9001Quality system
01 · Semiconductor equipment

Semiconductor fab equipment categories.

Lithography hardware

Photolithography stepper/scanner components. Precision stages, optical mounts, reticle handling. Sub-micron tolerance.

Wafer handling

Wafer transport hardware — end effectors, robot arm components. ESD-safe materials required.

Vacuum chambers

Deposition and etch chamber bodies. Electropolished interior, CF flange interfaces, helium leak tested.

Process chamber internals

Showerheads, chamber furniture, specialty process hardware. High-purity, particle-controlled.

CMP equipment

Chemical mechanical polishing tool hardware. Slurry-resistant materials.

Test probe hardware

Probe station components, probe card hardware. Low-CTE for stable measurements.

Ion implant hardware

Ion implanter components, beam line hardware, source hardware.

Precision stages

Ultra-precision XY stages, piezo positioning hardware. Sub-nanometer positioning.

Electron optics

Electron microscope and e-beam lithography components. Magnetic shielding considerations.

Different semiconductor tools have different manufacturing requirements. Lithography prioritizes precision. Etch prioritizes chemical resistance. Deposition prioritizes cleanliness.

02 · Semiconductor customers

Semiconductor customers we serve.

ASML supply chain

ASML lithography Tier-2/3 — optical mounts, precision hardware, stage components

Applied Materials

Applied Materials Tier-2/3 — deposition and etch tool components

Lam Research

Lam Research etch tool supply chain

Tokyo Electron

TEL equipment components

KLA inspection

KLA-Tencor inspection equipment components

Semiconductor fabs

Direct support of fab infrastructure (TSMC, Samsung, Intel Foundries)

Chinese semiconductor

SMIC, YMTC, Hua Hong — Chinese semiconductor equipment supply chain

Fab tool startups

Semiconductor equipment startup supply chain support

Research institutions

Universities and research labs with semiconductor research needs

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Send your CAD — we reply with detailed pricing, lead time, and DFM feedback within 4 working hours.

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WhatsApp our team directly. Most messages answered within 12 minutes during work hours.

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CNC, 3D printing, injection molding, sheet metal, casting, finishing — one quality system, one partner.

FAQ

Wafer handling — questions

Semiconductor cleanliness requirements?

Semiconductor parts must be extremely clean — particles, ionic contamination, outgassing all critical. Our semiconductor workflow: dedicated machining area (no cross-contamination), ultrasonic clean in multiple stages (DI water + IPA + specialty solutions), packaging in class 1000 / ISO 6 clean environment, double-bagged delivery. For critical semiconductor parts, individual particle counts documented.

ESD-safe materials?

Semiconductor handling requires ESD-safe materials — prevent static damage to sensitive semiconductor devices. Common ESD-safe materials: PEEK-CF30 (carbon-filled PEEK, surface resistance 10^4-10^6 Ω), conductive Delrin, specific ESD-safe machined plastics. We machine ESD-safe materials in dedicated ESD-safe area with documented material certification.

Low outgassing importance?

Semiconductor vacuum chambers require ultra-low outgassing components — trapped gases release slowly, contaminating processes. Critical for processes targeting atomic-layer purity. Materials: 316L electropolished, Vespel SP-1, OFE copper, specific UHV-qualified ceramics. Processing: thorough cleaning, vacuum bake-out at elevated temperature to drive off residuals. Our semiconductor parts meet sub-10^-10 mbar·L/s total outgassing.

Precision tolerances for semiconductor?

Semiconductor equipment pushes precision limits. Typical: lithography stage features ±0.005 mm. Optical mount datums ±0.002 mm. Standard industrial: ±0.01-0.025 mm. We CMM-verify critical dimensions with temperature-compensated measurements. For sub-micron critical features, interferometric measurement through partner labs.

Materials specifically for semiconductor?

Common semiconductor-industry materials: 316L (chamber structural), Invar 36 (precision stages, low thermal drift), Mo-Cu composite (thermal management with CTE matching silicon), PEEK-CF30 (ESD-safe wafer handling), aluminum 6061 (general), specialty ceramics (aluminum oxide, silicon carbide — through partners). Material choice driven by specific application — chemistry, temperature, vacuum, cleanliness requirements.

Typical semiconductor program lead times?

Semiconductor programs typically plan 12-24 weeks ahead. Material sourcing for specialty alloys: 4-6 weeks. Machining: 4-8 weeks for complex work. Qualification testing and documentation: 2-6 weeks. Production programs: ongoing monthly deliveries with standing PO. For production equipment manufacturers (ASML, AMAT), supplier relationships are years-long with regular orders.

5-axis CNC milling drawing: Al 7075-T6 block with pockets, toolpath and dimensions

Send a CAD file. Get an engineering-reviewed quote.

No minimum quantity, free DFM feedback from a senior manufacturing engineer, and an NDA signed before file review on request.